Direct experimental evidence linking silicon dangling bond defects to oxide leakage currents

P. M. Lenahan, J. J. Mele, J. P. Campbell, A. Y. Kang, R. K. Lowry, D. Woodbury, S. T. Liu, R. Weimer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

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Engineering & Materials Science