Direct force balance method for atomic force microscopy lateral force calibration

David B. Asay, Seong H. Kim

Research output: Contribution to journalArticlepeer-review

47 Scopus citations


A new and simple calibration method for atomic force microscopy (AFM) is developed. This nonscanning method is based on direct force balances on surfaces with known slopes. The lateral force calibration is performed during force-distance measurements for normal force calibration. This method requires a substrate with known slopes, the z motion of the piezocalibrated, and the normal spring constant known. This technique determines not only the lateral detector sensitivity (N/V) but also the detector offset (V/m) and off-centering angle (α) for asymmetric cantilever-tip geometries. Because it is nonscanning, the AFM cantilever can be calibrated without dulling the tip.

Original languageEnglish (US)
Article number043903
JournalReview of Scientific Instruments
Issue number4
StatePublished - 2006

All Science Journal Classification (ASJC) codes

  • Instrumentation


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