Directed fabrication of ceramic nanostructures on fragile substrates using soft-electron beam lithography (soft-eBL)

Suresh Donthu, Nasim Alem, Zixiao Pan, Shu You Li, Gajendra Shekhawat, Vinayak Dravid, Kurt D. Benkstein, Steve Semancik

Research output: Contribution to journalArticle

4 Scopus citations

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Engineering & Materials Science