Distribution of the energy levels of individual interface traps and a fundamental refinement in charge pumping theory

Toshiaki Tsuchiya, Patrick M. Lenahan

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We carried out a unique and systematic characterization of single amphoteric Si/SiO2 interface traps using the charge pumping (CP) method. As a result, we obtained the distribution of the energy levels of these traps for the first time. The distribution is reasonably similar to that of the Pb0 density of states reported previously. By considering the essential nature of these traps (i.e., those with two energy levels), factors depending on the energy levels, and the Coulomb interactions between traps, we fundamentally corrected the conventional CP theory.

Original languageEnglish (US)
Article number031301
JournalJapanese Journal of Applied Physics
Issue number3
StatePublished - Mar 2017


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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