D+, He+ and H+ sputtering of solid and liquid phase tin

M. D. Coventry, J. P. Allain, D. N. Ruzic

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations

Abstract

Absolute sputtering yields of Sn in the solid and liquid phases for incident H+, D+, and He+ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45° to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation.

Original languageEnglish (US)
Pages (from-to)636-640
Number of pages5
JournalJournal of Nuclear Materials
Volume313-316
Issue numberSUPPL.
DOIs
StatePublished - Mar 1 2003
EventPlasma - Surface Interactions in Controlled Fusion Devices - Gifu, Japan
Duration: May 26 2002May 31 2002

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Materials Science(all)
  • Nuclear Energy and Engineering

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