D+, He+ and H+ sputtering of solid and liquid phase tin

M. D. Coventry, Jean Paul Allain, D. N. Ruzic

Research output: Contribution to journalConference article

15 Citations (Scopus)

Abstract

Absolute sputtering yields of Sn in the solid and liquid phases for incident H+, D+, and He+ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45° to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation.

Original languageEnglish (US)
Pages (from-to)636-640
Number of pages5
JournalJournal of Nuclear Materials
Volume313-316
Issue numberSUPPL.
DOIs
StatePublished - Mar 1 2003
EventPlasma - Surface Interactions in Controlled Fusion Devices - Gifu, Japan
Duration: May 26 2002May 31 2002

Fingerprint

Tin
Sputtering
solid phases
tin
liquid phases
sputtering
Ions
surface reactions
Liquids
ions
Quartz crystal microbalances
Experiments
experimentation
Ion sources
quartz crystals
microbalances
ion sources
Oxides
Ion beams
Monolayers

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Materials Science(all)
  • Nuclear Energy and Engineering

Cite this

Coventry, M. D. ; Allain, Jean Paul ; Ruzic, D. N. / D+, He+ and H+ sputtering of solid and liquid phase tin. In: Journal of Nuclear Materials. 2003 ; Vol. 313-316, No. SUPPL. pp. 636-640.
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D+, He+ and H+ sputtering of solid and liquid phase tin. / Coventry, M. D.; Allain, Jean Paul; Ruzic, D. N.

In: Journal of Nuclear Materials, Vol. 313-316, No. SUPPL., 01.03.2003, p. 636-640.

Research output: Contribution to journalConference article

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T1 - D+, He+ and H+ sputtering of solid and liquid phase tin

AU - Coventry, M. D.

AU - Allain, Jean Paul

AU - Ruzic, D. N.

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AB - Absolute sputtering yields of Sn in the solid and liquid phases for incident H+, D+, and He+ ions with energies of 300 to 1000 eV were determined via a series of experiments using the ion-surface interaction experiment (IIAX), a facility designed to measure such ion-surface interactions. IIAX incorporates an ion source with an array of ion beam filters and optics to bring a near mono-energetic beam of ions to the target, in this case at 45° to the surface normal. A pair of quartz crystal microbalances record the amount of mass collected from both sputtering and evaporation from the target. VFTRIM-3D modeling results of tin sputtering best fit the experimental data when the bulk of pure tin was modeled with 60% SnO coverage in the top three monolayers most likely indicating the presence of a very thin oxide layer during experimentation.

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