Dynamic metasurface lens based on MEMS technology

Tapashree Roy, Shuyan Zhang, Il Woong Jung, Mariano Troccoli, Federico Capasso, Daniel Lopez

Research output: Contribution to journalArticlepeer-review

74 Scopus citations

Abstract

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

Original languageEnglish (US)
Article number021302
JournalAPL Photonics
Volume3
Issue number2
DOIs
StatePublished - Feb 1 2018

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications

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