Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

Antonios Armaou, Amit Varshney

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations

Abstract

We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

Original languageEnglish (US)
Pages (from-to)279-286
Number of pages8
JournalProceedings of the American Control Conference
Volume1
DOIs
StatePublished - 2004
EventProceedings of the 2004 American Control Conference (AAC) - Boston, MA, United States
Duration: Jun 30 2004Jul 2 2004

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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