Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

Antonios Armaou, Amit Varshney

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

Original languageEnglish (US)
Pages (from-to)279-286
Number of pages8
JournalProceedings of the American Control Conference
Volume1
StatePublished - Nov 29 2004
EventProceedings of the 2004 American Control Conference (AAC) - Boston, MA, United States
Duration: Jun 30 2004Jul 2 2004

Fingerprint

Vapor phase epitaxy
Parameterization
Epitaxial growth
Partial differential equations
Thin films
Substrates
Metals

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

@article{d800ff96cf9f4b0e92936bb02ddd6d7f,
title = "Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy",
abstract = "We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.",
author = "Antonios Armaou and Amit Varshney",
year = "2004",
month = "11",
day = "29",
language = "English (US)",
volume = "1",
pages = "279--286",
journal = "Proceedings of the American Control Conference",
issn = "0743-1619",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

Dynamic optimization of dissipative PDEs using control vector parameterization : Application to GaN thin film epitaxy. / Armaou, Antonios; Varshney, Amit.

In: Proceedings of the American Control Conference, Vol. 1, 29.11.2004, p. 279-286.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Dynamic optimization of dissipative PDEs using control vector parameterization

T2 - Application to GaN thin film epitaxy

AU - Armaou, Antonios

AU - Varshney, Amit

PY - 2004/11/29

Y1 - 2004/11/29

N2 - We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

AB - We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=8744241221&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8744241221&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:8744241221

VL - 1

SP - 279

EP - 286

JO - Proceedings of the American Control Conference

JF - Proceedings of the American Control Conference

SN - 0743-1619

ER -