Dynamic response of a piezoelectric flextensional microactuator

Jongpil Cheong, Srinivas A. Tadigadapa, Christopher D. Rahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microactuators capable of providing high resolution displacement and controlled force have many applications in RF MEMS, microfluidics, and motion control. This paper theoretically and experimentally investigates the dynamic response of a piezoelectric flextensional microactuator consisting of a clamped beam that buckles in response to contraction of a bonded PZT support. The DRIE and solder bonding fabrication process produces beams with initial curvature that affects their dynamic response. Unlike previous research where sinusoidal initial beam shapes are analyzed, polynomial initial beam shape enables more accurate prediction of beam natural frequencies and frequency response when compared with experimental results. The inclusion of squeeze film damping between the beam and PZT support enables the model to predict frequency response. Experiments show that mounting the PZT with soft carbon tape limits PZT vibration.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise
Pages2037-2042
Number of pages6
Volume1 C
StatePublished - 2005
EventDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States
Duration: Sep 24 2005Sep 28 2005

Other

OtherDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityLong Beach, CA
Period9/24/059/28/05

Fingerprint

Microactuators
Frequency response
Dynamic response
Motion control
Mountings
Microfluidics
Soldering alloys
Tapes
MEMS
Natural frequencies
Damping
Polynomials
Fabrication
Carbon
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Cheong, J., Tadigadapa, S. A., & Rahn, C. D. (2005). Dynamic response of a piezoelectric flextensional microactuator. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise (Vol. 1 C, pp. 2037-2042)
Cheong, Jongpil ; Tadigadapa, Srinivas A. ; Rahn, Christopher D. / Dynamic response of a piezoelectric flextensional microactuator. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise. Vol. 1 C 2005. pp. 2037-2042
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abstract = "Microactuators capable of providing high resolution displacement and controlled force have many applications in RF MEMS, microfluidics, and motion control. This paper theoretically and experimentally investigates the dynamic response of a piezoelectric flextensional microactuator consisting of a clamped beam that buckles in response to contraction of a bonded PZT support. The DRIE and solder bonding fabrication process produces beams with initial curvature that affects their dynamic response. Unlike previous research where sinusoidal initial beam shapes are analyzed, polynomial initial beam shape enables more accurate prediction of beam natural frequencies and frequency response when compared with experimental results. The inclusion of squeeze film damping between the beam and PZT support enables the model to predict frequency response. Experiments show that mounting the PZT with soft carbon tape limits PZT vibration.",
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Cheong, J, Tadigadapa, SA & Rahn, CD 2005, Dynamic response of a piezoelectric flextensional microactuator. in Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise. vol. 1 C, pp. 2037-2042, DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Long Beach, CA, United States, 9/24/05.

Dynamic response of a piezoelectric flextensional microactuator. / Cheong, Jongpil; Tadigadapa, Srinivas A.; Rahn, Christopher D.

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise. Vol. 1 C 2005. p. 2037-2042.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Cheong J, Tadigadapa SA, Rahn CD. Dynamic response of a piezoelectric flextensional microactuator. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mech. Vibration and Noise. Vol. 1 C. 2005. p. 2037-2042