Dynamic simulation of optical MEM switches

T. P. Kurzweg, J. A. Martinez, S. P. Levitan, P. J. Marchand, D. M. Chiarulli

Research output: Contribution to journalConference article

Abstract

Optical microelectromechanical (MEM) switches were simulated for optical fiber telecommunications applications. Simulation was based on a fabricated switch based on 4 fibers coming to a 4-way free-space intersection. Surface roughness and smoothness of the surface was determined by techniques used to fabricate the component in optical MEM systems. The simulation of the switch was examined by an input rise and fall time caused by an electrostatic attraction between the cantilever beam and the substrate.

Original languageEnglish (US)
Pages (from-to)104-115
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4408
DOIs
StatePublished - Jan 1 2001
EventDesign, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France
Duration: Apr 25 2001Apr 27 2001

Fingerprint

Dynamic Simulation
Switch
switches
Switches
Computer simulation
Cantilever Beam
simulation
cantilever beams
Cantilever beams
Free Space
Surface Roughness
Micro-electro-mechanical Systems
Telecommunications
Optical System
Electrostatics
intersections
Optical Fiber
microelectromechanical systems
MEMS
attraction

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Kurzweg, T. P. ; Martinez, J. A. ; Levitan, S. P. ; Marchand, P. J. ; Chiarulli, D. M. / Dynamic simulation of optical MEM switches. In: Proceedings of SPIE - The International Society for Optical Engineering. 2001 ; Vol. 4408. pp. 104-115.
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Dynamic simulation of optical MEM switches. / Kurzweg, T. P.; Martinez, J. A.; Levitan, S. P.; Marchand, P. J.; Chiarulli, D. M.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4408, 01.01.2001, p. 104-115.

Research output: Contribution to journalConference article

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