The generation of electrically neutral E′ centers was studied. It was found that the generation of these centers is accompanied by a large monotonic increase in leakage currents and that the disappearance of these centers is accompanied by a monotonic decrease in leakage currents. Overall, the results indicate an important role for E′ centers in stress induced leakage currents.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Jul 1 2000|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering