ECS Transactions: Preface

Takeshi Hattori, Jerzy Ruzyllo, Paul Mertens, Richard E. Novak

Research output: Contribution to journalEditorial

Original languageEnglish (US)
JournalECS Transactions
Volume41
Issue number5
StatePublished - Dec 1 2011
Event12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting - Boston, MA, United States
Duration: Oct 10 2011Oct 11 2011

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hattori, T., Ruzyllo, J., Mertens, P., & Novak, R. E. (2011). ECS Transactions: Preface. ECS Transactions, 41(5).
Hattori, Takeshi ; Ruzyllo, Jerzy ; Mertens, Paul ; Novak, Richard E. / ECS Transactions : Preface. In: ECS Transactions. 2011 ; Vol. 41, No. 5.
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journal = "ECS Transactions",
issn = "1938-5862",
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Hattori, T, Ruzyllo, J, Mertens, P & Novak, RE 2011, 'ECS Transactions: Preface', ECS Transactions, vol. 41, no. 5.

ECS Transactions : Preface. / Hattori, Takeshi; Ruzyllo, Jerzy; Mertens, Paul; Novak, Richard E.

In: ECS Transactions, Vol. 41, No. 5, 01.12.2011.

Research output: Contribution to journalEditorial

TY - JOUR

T1 - ECS Transactions

T2 - Preface

AU - Hattori, Takeshi

AU - Ruzyllo, Jerzy

AU - Mertens, Paul

AU - Novak, Richard E.

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M3 - Editorial

AN - SCOPUS:84857271376

VL - 41

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

IS - 5

ER -

Hattori T, Ruzyllo J, Mertens P, Novak RE. ECS Transactions: Preface. ECS Transactions. 2011 Dec 1;41(5).