ECS Transactions: Preface

Takeshi Hattori, Jerzy Ruzyllo, Richard E. Novak, Paul Mertens, Pascal Besson

Research output: Contribution to journalEditorial

Original languageEnglish (US)
JournalECS Transactions
Volume25
Issue number5
StatePublished - Dec 1 2009
Event11th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 216th ECS Meeting - Vienna, Austria
Duration: Oct 4 2009Oct 9 2009

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hattori, T., Ruzyllo, J., Novak, R. E., Mertens, P., & Besson, P. (2009). ECS Transactions: Preface. ECS Transactions, 25(5).
Hattori, Takeshi ; Ruzyllo, Jerzy ; Novak, Richard E. ; Mertens, Paul ; Besson, Pascal. / ECS Transactions : Preface. In: ECS Transactions. 2009 ; Vol. 25, No. 5.
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Hattori, T, Ruzyllo, J, Novak, RE, Mertens, P & Besson, P 2009, 'ECS Transactions: Preface', ECS Transactions, vol. 25, no. 5.

ECS Transactions : Preface. / Hattori, Takeshi; Ruzyllo, Jerzy; Novak, Richard E.; Mertens, Paul; Besson, Pascal.

In: ECS Transactions, Vol. 25, No. 5, 01.12.2009.

Research output: Contribution to journalEditorial

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T2 - Preface

AU - Hattori, Takeshi

AU - Ruzyllo, Jerzy

AU - Novak, Richard E.

AU - Mertens, Paul

AU - Besson, Pascal

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Hattori T, Ruzyllo J, Novak RE, Mertens P, Besson P. ECS Transactions: Preface. ECS Transactions. 2009 Dec 1;25(5).