Effect of AlN interlayers on growth stress in GaN layers deposited on (111) Si

Srinivasan Raghavan, Xiaojun Weng, Elizabeth Dickey, Joan M. Redwing

Research output: Contribution to journalArticle

51 Scopus citations

Fingerprint Dive into the research topics of 'Effect of AlN interlayers on growth stress in GaN layers deposited on (111) Si'. Together they form a unique fingerprint.

Physics & Astronomy