Effect of annealing on the band alignment of ALD SiO2 on (AlxGa1-x)2O3 for x = 0.2 - 0.65

Chaker Fares, Zahabul Islam, Aman Haque, Max Kneiß, Holger Von Wenckstern, Marius Grundmann, Marko Tadjer, Fan Ren, S. J. Pearton

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Engineering & Materials Science

Chemical Compounds