Effect of dielectric layer on the response times of electrostatic MEMS switches

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Electrostatic MEMS switches have become prevalent because of low power consumption and ease of integration in micro-fabrication technology. The equations governing their dynamic response obtained by energy methods are nonlinear differential equations. Even the unit-step response of these devices requires numerical computation. Depending on the magnitude of the applied step voltage and the presence of dielectric in the actuator, the response could be recurring or non-recurring. Estimating the period time and the switching time in these cases proves to be hard because one has to solve the energy equation numerically which could be time consuming or difficult to converge if it is not posed properly. Elata et al. have developed excellent methods to obtain these times on a logarithmic scale of voltage more easily for the undamped case. This paper extends their work for the case when the bottom plate is covered with a dielectric layer. The stagnation time occurring before dynamic pull-in, and the switching time thereafter are first shown as nonlinear graphs with the dielectric permittivity as a parameter. They are also linearized on an exponential scale and made useful for quick look up and convenience of designers.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications III
DOIs
StatePublished - Jun 9 2011
EventMicro- and Nanotechnology Sensors, Systems, and Applications III - Orlando, FL, United States
Duration: Apr 25 2011Apr 29 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8031
ISSN (Print)0277-786X

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications III
CountryUnited States
CityOrlando, FL
Period4/25/114/29/11

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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