In this work it is shown that the MIS structure with an ultra-thin (20 Å < xi < 40 Å) oxide is distinguished by a unique mechanism of lateral conduction. The flow of the lateral current between the two metal electrodes formed on the surface of an ultra-thin silicon dioxide is found to take place through the silicon substrate and the two non-equilibrium MIS tunnel diodes formed by the metal electrodes, the ultra-thin oxide, and the silicon. One of these diodes is forward biased and the other reverse biased. It is shown that the main limitation to the lateral current comes from the reverse biased diode. A structure is proposed in which such a lateral current can be efficiently controlled by the injection of minority carriers from the gate of an appropriately formed, conventional MIS tunnel diode into the depletion region of the reverse biased diode, so limiting the lateral current. Various physical phenomena related to this effect are studied and discussed. The MIS lateral tunnel structure considered in this work was fabricated in order to investigate the influence of minority carrier injection on the lateral conduction in MIS tunnel devices. However, the ideas proposed in this work can be developed into useful device structures.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry