Effect of Oxygen Chemistry in Sputtering of Polymers

Michal Kanski, Barbara Jane Garrison, Zbigniew Postawa

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Molecular dynamics computer simulations are used to model kiloelectronvolt cluster bombardment of pure hydrocarbon [polyethylene (PE) and polystyrene (PS)] and oxygen-containing [paraformaldehyde (PFA) and polylactic acid (PLA)] polymers by 20 keV C60 projectiles at a 45°impact angle to investigate the chemical effect of oxygen in the substrate material on the sputtering process. The simulations demonstrate that the presence of oxygen enhances the formation of small molecules such as carbon monoxide, carbon dioxide, water, and various molecules containing Cî-?O double bonds. The explanation for the enhanced small molecule formation is the stability of carbon and oxygen multiple bonds relative to multiple bonds with only carbon atoms. This chemistry is reflected in the fraction of the ejected material that has a mass not higher than 104 amu. For PFA and PLA, the fraction is approximately 90% of the total mass, whereas for PE and PS, it is less than half.

Original languageEnglish (US)
Pages (from-to)1559-1562
Number of pages4
JournalJournal of Physical Chemistry Letters
Volume7
Issue number8
DOIs
StatePublished - May 5 2016

Fingerprint

Sputtering
Polymers
sputtering
chemistry
Oxygen
Polystyrenes
polymers
Polyethylene
oxygen
Molecules
Polyethylenes
polyethylenes
polystyrene
Carbon
molecules
acids
chemical effects
Acids
carbon
Carbon Monoxide

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physical and Theoretical Chemistry

Cite this

Kanski, Michal ; Garrison, Barbara Jane ; Postawa, Zbigniew. / Effect of Oxygen Chemistry in Sputtering of Polymers. In: Journal of Physical Chemistry Letters. 2016 ; Vol. 7, No. 8. pp. 1559-1562.
@article{f8253de22ac04d17b50340300925808d,
title = "Effect of Oxygen Chemistry in Sputtering of Polymers",
abstract = "Molecular dynamics computer simulations are used to model kiloelectronvolt cluster bombardment of pure hydrocarbon [polyethylene (PE) and polystyrene (PS)] and oxygen-containing [paraformaldehyde (PFA) and polylactic acid (PLA)] polymers by 20 keV C60 projectiles at a 45°impact angle to investigate the chemical effect of oxygen in the substrate material on the sputtering process. The simulations demonstrate that the presence of oxygen enhances the formation of small molecules such as carbon monoxide, carbon dioxide, water, and various molecules containing C{\^i}-?O double bonds. The explanation for the enhanced small molecule formation is the stability of carbon and oxygen multiple bonds relative to multiple bonds with only carbon atoms. This chemistry is reflected in the fraction of the ejected material that has a mass not higher than 104 amu. For PFA and PLA, the fraction is approximately 90{\%} of the total mass, whereas for PE and PS, it is less than half.",
author = "Michal Kanski and Garrison, {Barbara Jane} and Zbigniew Postawa",
year = "2016",
month = "5",
day = "5",
doi = "10.1021/acs.jpclett.6b00514",
language = "English (US)",
volume = "7",
pages = "1559--1562",
journal = "Journal of Physical Chemistry Letters",
issn = "1948-7185",
publisher = "American Chemical Society",
number = "8",

}

Effect of Oxygen Chemistry in Sputtering of Polymers. / Kanski, Michal; Garrison, Barbara Jane; Postawa, Zbigniew.

In: Journal of Physical Chemistry Letters, Vol. 7, No. 8, 05.05.2016, p. 1559-1562.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Effect of Oxygen Chemistry in Sputtering of Polymers

AU - Kanski, Michal

AU - Garrison, Barbara Jane

AU - Postawa, Zbigniew

PY - 2016/5/5

Y1 - 2016/5/5

N2 - Molecular dynamics computer simulations are used to model kiloelectronvolt cluster bombardment of pure hydrocarbon [polyethylene (PE) and polystyrene (PS)] and oxygen-containing [paraformaldehyde (PFA) and polylactic acid (PLA)] polymers by 20 keV C60 projectiles at a 45°impact angle to investigate the chemical effect of oxygen in the substrate material on the sputtering process. The simulations demonstrate that the presence of oxygen enhances the formation of small molecules such as carbon monoxide, carbon dioxide, water, and various molecules containing Cî-?O double bonds. The explanation for the enhanced small molecule formation is the stability of carbon and oxygen multiple bonds relative to multiple bonds with only carbon atoms. This chemistry is reflected in the fraction of the ejected material that has a mass not higher than 104 amu. For PFA and PLA, the fraction is approximately 90% of the total mass, whereas for PE and PS, it is less than half.

AB - Molecular dynamics computer simulations are used to model kiloelectronvolt cluster bombardment of pure hydrocarbon [polyethylene (PE) and polystyrene (PS)] and oxygen-containing [paraformaldehyde (PFA) and polylactic acid (PLA)] polymers by 20 keV C60 projectiles at a 45°impact angle to investigate the chemical effect of oxygen in the substrate material on the sputtering process. The simulations demonstrate that the presence of oxygen enhances the formation of small molecules such as carbon monoxide, carbon dioxide, water, and various molecules containing Cî-?O double bonds. The explanation for the enhanced small molecule formation is the stability of carbon and oxygen multiple bonds relative to multiple bonds with only carbon atoms. This chemistry is reflected in the fraction of the ejected material that has a mass not higher than 104 amu. For PFA and PLA, the fraction is approximately 90% of the total mass, whereas for PE and PS, it is less than half.

UR - http://www.scopus.com/inward/record.url?scp=84967211775&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84967211775&partnerID=8YFLogxK

U2 - 10.1021/acs.jpclett.6b00514

DO - 10.1021/acs.jpclett.6b00514

M3 - Article

C2 - 27063023

AN - SCOPUS:84967211775

VL - 7

SP - 1559

EP - 1562

JO - Journal of Physical Chemistry Letters

JF - Journal of Physical Chemistry Letters

SN - 1948-7185

IS - 8

ER -