Effect of polyatomic ion structure on thin-film growth

Experiments and molecular dynamics simulations

Muthu B.J. Wijesundara, Yuan Ji, Boris Ni, Susan B. Sinnott, Luke Hanley

Research output: Contribution to journalArticle

70 Citations (Scopus)

Abstract

The experiments described here examine 25-100 eV CF+3 and C3F+5 ion modification of a polystyrene (PS) surface, as analyzed by x-ray photoelectron spectroscopy. The molecular dynamics computer simulations probe the structurally and chemically similar reactions of 20-100 eV CH+3 and C3H+5 with PS. CF+3 and C3F+3 each form a distribution of different fluorocarbon (FC) functional groups on PS in amounts dependent upon the incident ion energy, structure, and fluence. Both ions deposit mostly intact upon the surface at 25 eV, although they also undergo some crosslinking upon deposition. Fragmentation of the two ions increases as the ion energies are increased to 50 eV. Both ions show increases in total fluorine and fluorinated carbon content when changing the ion energy from 25 to 50 eV. The simulations predict that CH+3 and C3H+5 behave in a similar fashion to their FC analogs, remaining mostly intact and either embedding or scattering from the surface without reacting at 20 eV. At 50 and 100 eV, the simulations predict fragmentation most or all of the time. The simulations also show that the chemical products of the collisions depend significantly on the structure of the incident isomer. The simulations further illustrate how the maximum penetration depth of ion fragments depends on ionic structure, incident energy, and the identity of the penetrating fragment. These ion-surface results are discussed in terms of their possible role in plasmas.

Original languageEnglish (US)
Pages (from-to)5004-5016
Number of pages13
JournalJournal of Applied Physics
Volume88
Issue number9
DOIs
StatePublished - Nov 1 2000

Fingerprint

molecular dynamics
thin films
ions
simulation
polystyrene
fluorocarbons
fragmentation
fragments
methylidyne
energy
crosslinking
embedding
x ray spectroscopy
fluorine
fluence
penetration
isomers
computerized simulation
deposits
photoelectron spectroscopy

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Wijesundara, Muthu B.J. ; Ji, Yuan ; Ni, Boris ; Sinnott, Susan B. ; Hanley, Luke. / Effect of polyatomic ion structure on thin-film growth : Experiments and molecular dynamics simulations. In: Journal of Applied Physics. 2000 ; Vol. 88, No. 9. pp. 5004-5016.
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Effect of polyatomic ion structure on thin-film growth : Experiments and molecular dynamics simulations. / Wijesundara, Muthu B.J.; Ji, Yuan; Ni, Boris; Sinnott, Susan B.; Hanley, Luke.

In: Journal of Applied Physics, Vol. 88, No. 9, 01.11.2000, p. 5004-5016.

Research output: Contribution to journalArticle

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