TY - JOUR
T1 - Effect of sample rotation on surface roughness with keV C60 bombardment in secondary ion mass spectrometry (SIMS) experiments
AU - Garrison, Barbara J.
AU - Postawa, Zbigniew
N1 - Funding Information:
The authors gratefully acknowledge financial support from the National Science Foundation Grant No. CHE-0910564 and the Polish Ministry of Science and Higher Education Program No. N N204 183940 . Helpful discussions with Andreas Wucher , Nick Winograd and John Vickerman are greatly appreciated.
PY - 2011/4/20
Y1 - 2011/4/20
N2 - The simplicity of interpreting depth profiling in SIMS experiments is often limited by sample damage and surface roughness that accompany the ion bombardment process. Molecular dynamics simulations are implemented to obtain mechanistic insight into the improvement of depth profiles due to sample rotation during keV C60 bombardment of solids. The simulations show that sample rotation decreases the RMS roughness of the sample compared to a single azimuthal angle of incidence, as observed by experiment. The improvement is most noticeable for near-grazing angles of incidence. Bombardment of the sample at these angles builds up an anisotropic topology which sample rotation at least partially removes.
AB - The simplicity of interpreting depth profiling in SIMS experiments is often limited by sample damage and surface roughness that accompany the ion bombardment process. Molecular dynamics simulations are implemented to obtain mechanistic insight into the improvement of depth profiles due to sample rotation during keV C60 bombardment of solids. The simulations show that sample rotation decreases the RMS roughness of the sample compared to a single azimuthal angle of incidence, as observed by experiment. The improvement is most noticeable for near-grazing angles of incidence. Bombardment of the sample at these angles builds up an anisotropic topology which sample rotation at least partially removes.
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U2 - 10.1016/j.cplett.2011.03.003
DO - 10.1016/j.cplett.2011.03.003
M3 - Article
AN - SCOPUS:79954579930
SN - 0009-2614
VL - 506
SP - 129
EP - 134
JO - Chemical Physics Letters
JF - Chemical Physics Letters
IS - 4-6
ER -