Effects of gas adsorption in nanotribologyand demonstration of in-situ vapor phase lubrication of MEMS devices

David B. Asa, Michael T. Dugger, Seong H. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses the important role of gas adsorption in nanotribology and demonstrates in-situ vapor phase lubrication of microelectromechanical systems (MEMS) devices. We have elucidated the molecular ordering and thickness of the adsorbed water layer on the clean silicon oxide surface and found the molecular-level origin for the high adhesion between nano-asperity silicon oxide contacts in humid ambient. The same gas adsorption process can be utilized for continuous supply of lubricant molecules to form a few Å thick lubricant films on solid surfaces. Using alcohol vapor adsorption, we demonstrated that the adhesion, friction, and wear of the silicon oxide surface can significantly be reduced. This process made it possible to operate sliding MEMS without failure for an extended period of time.

Original languageEnglish (US)
Title of host publication2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Pages885-887
Number of pages3
DOIs
StatePublished - May 19 2008
Event2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 - San Diego, CA, United States
Duration: Oct 22 2007Oct 24 2007

Publication series

Name2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
VolumePART B

Other

Other2007 ASME/STLE International Joint Tribology Conference, IJTC 2007
CountryUnited States
CitySan Diego, CA
Period10/22/0710/24/07

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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    Asa, D. B., Dugger, M. T., & Kim, S. H. (2008). Effects of gas adsorption in nanotribologyand demonstration of in-situ vapor phase lubrication of MEMS devices. In 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007 (pp. 885-887). (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007; Vol. PART B). https://doi.org/10.1115/IJTC2007-44419