Effects of silicon doping and threading dislocation density on stress evolution in AlGaN films

Joan M. Redwing, Ian C. Manning, Xiaojun Weng, Sarah M. Eichfeld, Jeremy D. Acord, Mark A. Fanton, David W. Snyder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy