Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Hong Goo Yeo; Xiaokun Ma; Christopher D. Rahn; Susan E. Trolier-McKinstry

doi:10.1002/adfm.201601347

Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Hong Goo Yeo, Xiaokun Ma, Christopher D. Rahn, Susan E. Trolier-McKinstry

Research output: Contribution to journal › Article

48 Scopus citations

Abstract

Extracting energy from low vibration frequencies (<10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a significantly higher efficiency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr,Ti)O₃ (PZT) films on Ni foil deposited by rf magnetron sputtering is shown to have high efficiency and large power for low frequency mechanical vibration. In particular, {001} textured PZT films are deposited on both sides of polished Ni foils with (100) oriented LaNiO₃ seed layers on HfO₂ buffer layers. The performance of PCM with an active area of 5.2 cm² is explored for various excitation accelerations (0.02–0.16 g [g = 9.8 m s⁻²]) around 6 Hz. The PCM device provides a power level of 3.9 mW cm⁻² g² and 65% mode shape efficiencies.

Original language	English (US)
Pages (from-to)	5940-5946
Number of pages	7
Journal	Advanced Functional Materials
Volume	26
Issue number	32
DOIs	https://doi.org/10.1002/adfm.201601347
State	Published - Aug 23 2016

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Biomaterials
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Electrochemistry

Cite this

Yeo, H. G., Ma, X., Rahn, C. D., & Trolier-McKinstry, S. E. (2016). Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils. Advanced Functional Materials, 26(32), 5940-5946. https://doi.org/10.1002/adfm.201601347

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10.1002/adfm.201601347