Efficient primary and parametric resonance excitation of bistable resonators

A. Ramini, N. Alcheikh, S. Ilyas, M. I. Younis

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We experimentally demonstrate an efficient approach to excite primary and parametric (up to the 4th) resonance of Microelectromechanical system MEMS arch resonators with large vibrational amplitudes. A single crystal silicon in-plane arch microbeam is fabricated such that it can be excited axially from one of its ends by a parallel-plate electrode. Its micro/nano scale vibrations are transduced using a high speed camera. Through the parallel-plate electrode, a time varying electrostatic force is applied, which is converted into a time varying axial force that modulates dynamically the stiffness of the arch resonator. Due to the initial curvature of the structure, not only parametric excitation is induced, but also primary resonance. Experimental investigation is conducted comparing the response of the arch near primary resonance using the axial excitation to that of a classical parallel-plate actuation where the arch itself forms an electrode. The results show that the axial excitation can be more efficient and requires less power for primary resonance excitation. Moreover, unlike the classical method where the structure is vulnerable to the dynamic pull-in instability, the axial excitation technique can provide large amplitude motion while protecting the structure from pull-in. In addition to primary resonance, parametrical resonances are demonstrated at twice, one-half, and two-thirds the primary resonance frequency. The ability to actuate primary and/or parametric resonances can serve various applications, such as for resonator based logic and memory devices.

Original languageEnglish (US)
Article number095307
JournalAIP Advances
Volume6
Issue number9
DOIs
StatePublished - Sep 1 2016

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resonators
arches
excitation
parallel plates
microelectromechanical systems
electrodes
microbeams
high speed cameras
actuation
logic
stiffness
curvature
electrostatics
vibration
single crystals
silicon

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Ramini, A. ; Alcheikh, N. ; Ilyas, S. ; Younis, M. I. / Efficient primary and parametric resonance excitation of bistable resonators. In: AIP Advances. 2016 ; Vol. 6, No. 9.
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Efficient primary and parametric resonance excitation of bistable resonators. / Ramini, A.; Alcheikh, N.; Ilyas, S.; Younis, M. I.

In: AIP Advances, Vol. 6, No. 9, 095307, 01.09.2016.

Research output: Contribution to journalArticle

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