Electrical characterization of As-Processed semiconductor surfaces

Jerzy Ruzyllo, Patrick J. Drummond

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper is concerned with electrical characterization of as-processed semiconductor surfaces and near-surface regions for the purpose of process development and monitoring. The methods of electrical characterization based on Surface Photovoltage (SPV) and Photoconductance Decay (PCD) effects are discussed as being particularly conducive with the needs of as-processed semiconductor surface characterization and experimental results demonstrating merits of the proposed methodology are presented.

Original languageEnglish (US)
Title of host publicationUltra Clean Processing of Semiconductor Surfaces XIII
EditorsPaul W. Mertens, Marc Meuris, Marc Meuris, Marc Heyns
PublisherTrans Tech Publications Ltd
Pages299-303
Number of pages5
ISBN (Print)9783035710847
DOIs
StatePublished - Jan 1 2016
Event13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces , UCPSS 2016 - Knokke, Belgium
Duration: Sep 12 2016Sep 14 2016

Publication series

NameSolid State Phenomena
Volume255
ISSN (Print)1012-0394
ISSN (Electronic)1662-9779

Other

Other13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces , UCPSS 2016
CountryBelgium
CityKnokke
Period9/12/169/14/16

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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  • Cite this

    Ruzyllo, J., & Drummond, P. J. (2016). Electrical characterization of As-Processed semiconductor surfaces. In P. W. Mertens, M. Meuris, M. Meuris, & M. Heyns (Eds.), Ultra Clean Processing of Semiconductor Surfaces XIII (pp. 299-303). (Solid State Phenomena; Vol. 255). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.255.299