Electrical conduction in thin film diamond

K. Srikanth, S. Ashok, A. Badzian, T. Badzian, R. Messier

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

The electrical conduction in thin film diamond synthesized by microwave plasma enehanced chemical vapor deposition has been studied with metal-diamond-silicon metal-insulator-semiconductor structures. Measurements over a wide temperature range provide evidence for space-charge-limited current in the presence of traps. An exponential distribution of traps with a peak value of the order of 3 × 1020 cm-3 eV-1 has been deduced from the current-voltage-temperature data.

Original languageEnglish (US)
Pages (from-to)187-190
Number of pages4
JournalThin Solid Films
Volume164
Issue numberC
DOIs
StatePublished - Oct 1988

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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