Electrical studies on Parylene-C columnar microfibrous thin films

Ibrahim H. Khawaji, Chandraprakash Chindam, Wasim Orfali, Osama O. Awadelkarim, Akhlesh Lakhtakia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.

Original languageEnglish (US)
Title of host publicationSemiconductors, Dielectrics, and Metals for Nanoelectronics 13
EditorsS. Kar, D. Misra, K. Kita, D. Landheer
PublisherElectrochemical Society Inc.
Pages113-119
Number of pages7
Edition5
ISBN (Electronic)9781607685395
DOIs
StatePublished - Jan 1 2015
EventSymposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting - Phoenix, United States
Duration: Oct 11 2015Oct 15 2015

Publication series

NameECS Transactions
Number5
Volume69
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Other

OtherSymposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting
CountryUnited States
CityPhoenix
Period10/11/1510/15/15

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Khawaji, I. H., Chindam, C., Orfali, W., Awadelkarim, O. O., & Lakhtakia, A. (2015). Electrical studies on Parylene-C columnar microfibrous thin films. In S. Kar, D. Misra, K. Kita, & D. Landheer (Eds.), Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 (5 ed., pp. 113-119). (ECS Transactions; Vol. 69, No. 5). Electrochemical Society Inc.. https://doi.org/10.1149/06905.0113ecst