Electrical studies on Parylene-C columnar microfibrous thin films

Ibrahim H. Khawaji, Chandraprakash Chindam, Wasim Orfali, Osama O. Awadelkarim, Akhlesh Lakhtakia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.

Original languageEnglish (US)
Title of host publicationSemiconductors, Dielectrics, and Metals for Nanoelectronics 13
EditorsS. Kar, D. Misra, K. Kita, D. Landheer
PublisherElectrochemical Society Inc.
Pages113-119
Number of pages7
Edition5
ISBN (Electronic)9781607685395
DOIs
StatePublished - Jan 1 2015
EventSymposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting - Phoenix, United States
Duration: Oct 11 2015Oct 15 2015

Publication series

NameECS Transactions
Number5
Volume69
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Other

OtherSymposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting
CountryUnited States
CityPhoenix
Period10/11/1510/15/15

Fingerprint

Leakage currents
Thin films
Metals
Vapor deposition
Capacitance measurement
Gate dielectrics
Electric current measurement
Electric properties
Capacitance
Semiconductor materials
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Khawaji, I. H., Chindam, C., Orfali, W., Awadelkarim, O. O., & Lakhtakia, A. (2015). Electrical studies on Parylene-C columnar microfibrous thin films. In S. Kar, D. Misra, K. Kita, & D. Landheer (Eds.), Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 (5 ed., pp. 113-119). (ECS Transactions; Vol. 69, No. 5). Electrochemical Society Inc.. https://doi.org/10.1149/06905.0113ecst
Khawaji, Ibrahim H. ; Chindam, Chandraprakash ; Orfali, Wasim ; Awadelkarim, Osama O. ; Lakhtakia, Akhlesh. / Electrical studies on Parylene-C columnar microfibrous thin films. Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. editor / S. Kar ; D. Misra ; K. Kita ; D. Landheer. 5. ed. Electrochemical Society Inc., 2015. pp. 113-119 (ECS Transactions; 5).
@inproceedings{8ae986474d0041f884524ca125d599ae,
title = "Electrical studies on Parylene-C columnar microfibrous thin films",
abstract = "Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.",
author = "Khawaji, {Ibrahim H.} and Chandraprakash Chindam and Wasim Orfali and Awadelkarim, {Osama O.} and Akhlesh Lakhtakia",
year = "2015",
month = "1",
day = "1",
doi = "10.1149/06905.0113ecst",
language = "English (US)",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "113--119",
editor = "S. Kar and D. Misra and K. Kita and D. Landheer",
booktitle = "Semiconductors, Dielectrics, and Metals for Nanoelectronics 13",
edition = "5",

}

Khawaji, IH, Chindam, C, Orfali, W, Awadelkarim, OO & Lakhtakia, A 2015, Electrical studies on Parylene-C columnar microfibrous thin films. in S Kar, D Misra, K Kita & D Landheer (eds), Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. 5 edn, ECS Transactions, no. 5, vol. 69, Electrochemical Society Inc., pp. 113-119, Symposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 13 - 228th ECS Meeting, Phoenix, United States, 10/11/15. https://doi.org/10.1149/06905.0113ecst

Electrical studies on Parylene-C columnar microfibrous thin films. / Khawaji, Ibrahim H.; Chindam, Chandraprakash; Orfali, Wasim; Awadelkarim, Osama O.; Lakhtakia, Akhlesh.

Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. ed. / S. Kar; D. Misra; K. Kita; D. Landheer. 5. ed. Electrochemical Society Inc., 2015. p. 113-119 (ECS Transactions; Vol. 69, No. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Electrical studies on Parylene-C columnar microfibrous thin films

AU - Khawaji, Ibrahim H.

AU - Chindam, Chandraprakash

AU - Orfali, Wasim

AU - Awadelkarim, Osama O.

AU - Lakhtakia, Akhlesh

PY - 2015/1/1

Y1 - 2015/1/1

N2 - Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.

AB - Columnar microfibrous thin films (μFTFs) of Parylene C are deposited on top of p-type Si substrate using physicochemical vapor deposition to form metal-insulator-semiconductor and metal-insulator-metal structures utilizing the Parylene-C μFTFs as the gate dielectric. The columnar μFTFs were characterized for their electrical properties and dielectric integrity using leakage-current and capacitance measurements at temperatures in the 200K - 500 K range and at frequencies in the range 1 kHz to 1 MHz. Observed variations in leakage current and capacitance were found to be consistent with transport mechanisms involving the Poole-Frenkel and Schottky emission mechanisms as well as carrier trapping/detrapping at interfacial traps.

UR - http://www.scopus.com/inward/record.url?scp=84946089175&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84946089175&partnerID=8YFLogxK

U2 - 10.1149/06905.0113ecst

DO - 10.1149/06905.0113ecst

M3 - Conference contribution

AN - SCOPUS:84946089175

T3 - ECS Transactions

SP - 113

EP - 119

BT - Semiconductors, Dielectrics, and Metals for Nanoelectronics 13

A2 - Kar, S.

A2 - Misra, D.

A2 - Kita, K.

A2 - Landheer, D.

PB - Electrochemical Society Inc.

ER -

Khawaji IH, Chindam C, Orfali W, Awadelkarim OO, Lakhtakia A. Electrical studies on Parylene-C columnar microfibrous thin films. In Kar S, Misra D, Kita K, Landheer D, editors, Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. 5 ed. Electrochemical Society Inc. 2015. p. 113-119. (ECS Transactions; 5). https://doi.org/10.1149/06905.0113ecst