Electrically detected magnetic resonance studies of processing variations in 4H SiC based MOSFETs

Corey J. Cochrane, Patrick M. Lenahan, Aivars J. Lelis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
StatePublished - Dec 1 2007
Event2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
Duration: Dec 12 2007Dec 14 2007

Publication series

Name2007 International Semiconductor Device Research Symposium, ISDRS

Other

Other2007 International Semiconductor Device Research Symposium, ISDRS
CountryUnited States
CityCollege Park, MD
Period12/12/0712/14/07

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Cochrane, C. J., Lenahan, P. M., & Lelis, A. J. (2007). Electrically detected magnetic resonance studies of processing variations in 4H SiC based MOSFETs. In 2007 International Semiconductor Device Research Symposium, ISDRS [4422483] (2007 International Semiconductor Device Research Symposium, ISDRS). https://doi.org/10.1109/ISDRS.2007.4422483