Electromechanically active flat optical devices

Tapashree Roy, Shuyan Zhang, Il Woong Jung, Federico Capasso, Daniel Lopez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate an electromechanically controllable reflective flat lens at mid-infrared wavelength. The lens is designed from plasmonic nano-discs, and focuses light at mid-infrared, 45° to the incoming beam. The flat lens is fabricated on a 2.8 µm thin membrane and integrated with a micro-electro-mechanical (MEMS) device. Mechanical testing of the MEMS device before and after integration of the flat lens confirms that the performance of the MEMS has not been compromised due to addition of a flat lens.

Original languageEnglish (US)
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages238-241
Number of pages4
ISBN (Electronic)9781940470023
DOIs
StatePublished - 2016
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: Jun 5 2016Jun 9 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
CountryUnited States
CityHilton Head
Period6/5/166/9/16

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Electromechanically active flat optical devices'. Together they form a unique fingerprint.

Cite this