Abstract
Migration of sodium in thin films of soda‐silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross‐section for electron‐induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 85-90 |
| Number of pages | 6 |
| Journal | Surface and Interface Analysis |
| Volume | 2 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jan 1 1980 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Electron beam effects during analysis of glass thin films with auger electron spectroscopy. / Ohuchi, F.; Ogino, M.; Holloway, P. H.; Pantano, Carlo G.
In: Surface and Interface Analysis, Vol. 2, No. 3, 01.01.1980, p. 85-90.Research output: Contribution to journal › Article
TY - JOUR
T1 - Electron beam effects during analysis of glass thin films with auger electron spectroscopy
AU - Ohuchi, F.
AU - Ogino, M.
AU - Holloway, P. H.
AU - Pantano, Carlo G.
PY - 1980/1/1
Y1 - 1980/1/1
N2 - Migration of sodium in thin films of soda‐silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross‐section for electron‐induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.
AB - Migration of sodium in thin films of soda‐silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross‐section for electron‐induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.
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U2 - 10.1002/sia.740020303
DO - 10.1002/sia.740020303
M3 - Article
AN - SCOPUS:0019021970
VL - 2
SP - 85
EP - 90
JO - Surface and Interface Analysis
JF - Surface and Interface Analysis
SN - 0142-2421
IS - 3
ER -