Electron beam effects during analysis of glass thin films with auger electron spectroscopy

F. Ohuchi, M. Ogino, P. H. Holloway, Carlo G. Pantano

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

Migration of sodium in thin films of soda‐silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross‐section for electron‐induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.

Original languageEnglish (US)
Pages (from-to)85-90
Number of pages6
JournalSurface and Interface Analysis
Volume2
Issue number3
DOIs
StatePublished - Jan 1 1980

Fingerprint

Auger electron spectroscopy
Auger spectroscopy
electron spectroscopy
Electron beams
Sodium
sodium
electron beams
Glass
Thin films
glass
thin films
Charge trapping
Current density
trapping
current density
Stainless Steel
Ion bombardment
high current
bombardment
stainless steels

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Ohuchi, F. ; Ogino, M. ; Holloway, P. H. ; Pantano, Carlo G. / Electron beam effects during analysis of glass thin films with auger electron spectroscopy. In: Surface and Interface Analysis. 1980 ; Vol. 2, No. 3. pp. 85-90.
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Electron beam effects during analysis of glass thin films with auger electron spectroscopy. / Ohuchi, F.; Ogino, M.; Holloway, P. H.; Pantano, Carlo G.

In: Surface and Interface Analysis, Vol. 2, No. 3, 01.01.1980, p. 85-90.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Electron beam effects during analysis of glass thin films with auger electron spectroscopy

AU - Ohuchi, F.

AU - Ogino, M.

AU - Holloway, P. H.

AU - Pantano, Carlo G.

PY - 1980/1/1

Y1 - 1980/1/1

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AB - Migration of sodium in thin films of soda‐silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross‐section for electron‐induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.

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