Electron energy-loss spectroscopy of alternative gate dielectric stacks

Susanne Stemmer, D. Klenov, Z. Chen, J. P. Maria, A. I. Kingon, D. Niu, G. N. Parsons

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)66-67
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
StatePublished - Nov 20 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Stemmer, S., Klenov, D., Chen, Z., Maria, J. P., Kingon, A. I., Niu, D., & Parsons, G. N. (2002). Electron energy-loss spectroscopy of alternative gate dielectric stacks. Microscopy and Microanalysis, 8(SUPPL. 2), 66-67.