Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs

T. S. Kuan, P. E. Batson, Thomas Nelson Jackson, H. Rupprecht, E. L. Wilkie

Research output: Contribution to journalArticle

177 Citations (Scopus)

Abstract

The interface structures resulting from the alloying reactions between a Au/Ni/Au-Ge composite film and a (100) GaAs substrate were studied by transmission electron microscopy and scanning transmission electron microscopy. Electron microscope examinations of the cross-sectional samples prepared in this study offered excellent lateral and depth resolution of local structures which are not available by other analytical techniques used previously in similar studies. The distributions and chemical compositions of various phases formed, and the morphologies of the interfaces between these phases were monitored and compared with the measured contact resistances at three different stages of alloying. A correlation between the interface structure and the contact resistance was found.

Original languageEnglish (US)
Pages (from-to)6952-6957
Number of pages6
JournalJournal of Applied Physics
Volume54
Issue number12
DOIs
StatePublished - Dec 1 1983

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electric contacts
electron microscopes
contact resistance
alloying
transmission electron microscopy
chemical composition
examination
scanning electron microscopy
composite materials

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Kuan, T. S. ; Batson, P. E. ; Jackson, Thomas Nelson ; Rupprecht, H. ; Wilkie, E. L. / Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs. In: Journal of Applied Physics. 1983 ; Vol. 54, No. 12. pp. 6952-6957.
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Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs. / Kuan, T. S.; Batson, P. E.; Jackson, Thomas Nelson; Rupprecht, H.; Wilkie, E. L.

In: Journal of Applied Physics, Vol. 54, No. 12, 01.12.1983, p. 6952-6957.

Research output: Contribution to journalArticle

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