Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

J. F. Conley, P. M. Lenahan, P. Roitman

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.

Original languageEnglish (US)
Pages (from-to)2889-2891
Number of pages3
JournalApplied Physics Letters
Volume60
Issue number23
DOIs
StatePublished - Dec 1 1992

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electron paramagnetic resonance
traps
oxides
oxygen
electrons

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

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title = "Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap",
abstract = "We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.",
author = "Conley, {J. F.} and Lenahan, {P. M.} and P. Roitman",
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Electron spin resonance of separation by implanted oxygen oxides : Evidence for structural change and a deep electron trap. / Conley, J. F.; Lenahan, P. M.; Roitman, P.

In: Applied Physics Letters, Vol. 60, No. 23, 01.12.1992, p. 2889-2891.

Research output: Contribution to journalArticle

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AU - Roitman, P.

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