Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

J. F. Conley, P. M. Lenahan, P. Roitman

Research output: Contribution to journalArticle

37 Scopus citations

Abstract

We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.

Original languageEnglish (US)
Pages (from-to)2889-2891
Number of pages3
JournalApplied Physics Letters
Volume60
Issue number23
DOIs
StatePublished - Dec 1 1992

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap'. Together they form a unique fingerprint.

  • Cite this