Electron spin resonance studies of interlayer dielectrics

Brad C. Bittel, T. A. Pomorski, Patrick M. Lenahan, S. W. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAdvanced Metallization Conference 2011
Pages60-61
Number of pages2
StatePublished - 2011
EventAdvanced Metallization Conference 2011 - San Diego, CA, United States
Duration: Oct 4 2011Oct 6 2011

Other

OtherAdvanced Metallization Conference 2011
CountryUnited States
CitySan Diego, CA
Period10/4/1110/6/11

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Paramagnetic resonance

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

Cite this

Bittel, B. C., Pomorski, T. A., Lenahan, P. M., & King, S. W. (2011). Electron spin resonance studies of interlayer dielectrics. In Advanced Metallization Conference 2011 (pp. 60-61)
Bittel, Brad C. ; Pomorski, T. A. ; Lenahan, Patrick M. ; King, S. W. / Electron spin resonance studies of interlayer dielectrics. Advanced Metallization Conference 2011. 2011. pp. 60-61
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title = "Electron spin resonance studies of interlayer dielectrics",
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year = "2011",
language = "English (US)",
isbn = "9781618394262",
pages = "60--61",
booktitle = "Advanced Metallization Conference 2011",

}

Bittel, BC, Pomorski, TA, Lenahan, PM & King, SW 2011, Electron spin resonance studies of interlayer dielectrics. in Advanced Metallization Conference 2011. pp. 60-61, Advanced Metallization Conference 2011, San Diego, CA, United States, 10/4/11.

Electron spin resonance studies of interlayer dielectrics. / Bittel, Brad C.; Pomorski, T. A.; Lenahan, Patrick M.; King, S. W.

Advanced Metallization Conference 2011. 2011. p. 60-61.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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BT - Advanced Metallization Conference 2011

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Bittel BC, Pomorski TA, Lenahan PM, King SW. Electron spin resonance studies of interlayer dielectrics. In Advanced Metallization Conference 2011. 2011. p. 60-61