Electron spin resonance studies of interlayer dielectrics

Brad C. Bittel, T. A. Pomorski, P. M. Lenahan, S. W. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAdvanced Metallization Conference 2011
Pages60-61
Number of pages2
StatePublished - Dec 1 2011
EventAdvanced Metallization Conference 2011 - San Diego, CA, United States
Duration: Oct 4 2011Oct 6 2011

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Other

OtherAdvanced Metallization Conference 2011
CountryUnited States
CitySan Diego, CA
Period10/4/1110/6/11

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

Cite this

Bittel, B. C., Pomorski, T. A., Lenahan, P. M., & King, S. W. (2011). Electron spin resonance studies of interlayer dielectrics. In Advanced Metallization Conference 2011 (pp. 60-61). (Advanced Metallization Conference (AMC)).