We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E′ centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300°C. Our results clearly show that E′ centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E′ centers play in thermal oxides.
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics
- Nuclear Energy and Engineering
- Electrical and Electronic Engineering