Electrophoretic deposition and sintering of thin/Thick PZT films

J. Van Tassel, C. A. Randall

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Abstract

Electrophoretic deposition (EPD) is a simple, rapid, and low cost method for forming dense lead zirconate titanate (PZT) films down to 5μm from particulate precursors. The three main steps of this process are: (1) formation of a charged suspension of the starting PZT powder; (2) deposition of the powder particles on an electrode under the influence of a dc electric field; and (3) fluxing and constrained sintering of the resulting particulate deposit at 900°C to form a dense continuous film. A 10μm film formed using this process exhibited a polarization hysteresis equivalent to that of a bulk sample formed from the same starting powder, with a remnant polarization of 33μCcm-2.

Original languageEnglish (US)
Pages (from-to)955-958
Number of pages4
JournalJournal of the European Ceramic Society
Volume19
Issue number6-7
StatePublished - Jun 1 1999

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All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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