Energy cost to sputter an atom from a surface in keV ion bombardment processes

B. J. Garrison; N. Winograd; D. Lo; T. A. Tombrello; M. H. Shapiro; D. E. Harrison

doi:10.1016/0039-6028(87)90212-3

Energy cost to sputter an atom from a surface in keV ion bombardment processes

B. J. Garrison, N. Winograd, D. Lo, T. A. Tombrello, M. H. Shapiro, D. E. Harrison

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.

Original language	English (US)
Pages (from-to)	L129-L133
Journal	Surface Science
Volume	180
Issue number	2-3
DOIs	https://doi.org/10.1016/0039-6028(87)90212-3
State	Published - Feb 2 1987

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Energy cost to sputter an atom from a surface in keV ion bombardment processes",

abstract = "We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.",

author = "Garrison, {B. J.} and N. Winograd and D. Lo and Tombrello, {T. A.} and Shapiro, {M. H.} and Harrison, {D. E.}",

note = "Funding Information: The authors would like to acknowledge their respective National Science Foundation grants. D.E.H. thanks the Foundation Research Program of the Naval Postgraduate School and B.J.G. appreciates support from the IBM Corporation and the Camille and Henry Dreyfus Foundation. Helpful comments were received from R. Kelly.",

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T1 - Energy cost to sputter an atom from a surface in keV ion bombardment processes

AU - Garrison, B. J.

AU - Winograd, N.

AU - Lo, D.

AU - Tombrello, T. A.

AU - Shapiro, M. H.

AU - Harrison, D. E.

N1 - Funding Information: The authors would like to acknowledge their respective National Science Foundation grants. D.E.H. thanks the Foundation Research Program of the Naval Postgraduate School and B.J.G. appreciates support from the IBM Corporation and the Camille and Henry Dreyfus Foundation. Helpful comments were received from R. Kelly.

PY - 1987/2/2

Y1 - 1987/2/2

N2 - We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.

AB - We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.

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ER -

Energy cost to sputter an atom from a surface in keV ion bombardment processes

Abstract

All Science Journal Classification (ASJC) codes

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