Energy cost to sputter an atom from a surface in keV ion bombardment processes

B. J. Garrison, N. Winograd, D. Lo, T. A. Tombrello, M. H. Shapiro, D. E. Harrison

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.

Original languageEnglish (US)
Pages (from-to)L129-L133
JournalSurface Science
Volume180
Issue number2-3
DOIs
StatePublished - Feb 2 1987

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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