Studies of the environmental aging of Schottky barriers were presented. To determine the influence of oxygen versus water vapor, Au diodes on wafer 5 were prepared using the shadow mask with an Al ohmic pad and were tested for environmental aging under controlled ambients. The annealing experiments revealed that the environmental change was partially reversible with storage in vacuum, or to a greater extent when the diodes were annealed in N2 gas up to 250°C. It was indicated that the environmental aging phenomenon is associated interfacial defects that exist at the metal/semiconductor interface.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry