@article{4ff542311c5d40229b52cbc1bb0be287,
title = "Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density",
abstract = "The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.",
author = "Z. Wang and Goodge, {B. H.} and Baek, {D. J.} and Zachman, {M. J.} and X. Huang and X. Bai and Brooks, {C. M.} and H. Paik and Mei, {A. B.} and Brock, {J. D.} and Maria, {J. P.} and Kourkoutis, {L. F.} and Schlom, {D. G.}",
note = "Funding Information: Z.W. and D.G.S. gratefully acknowledge the support from a GRO “functional oxides” project from the Samsung Advanced Institute of Technology. H.P. acknowledges support by the National Science Foundation [Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM)] under Cooperative Agreement No. DMR-1539918. B.H.G. and L.F.K. acknowledge support by the Department of Defense Air Force Office of Scientific Research (No. FA 9550-16-1-0305). J.P.M. acknowledges support from NSF Ceramics 1610844. The synchrotron-based x-ray experiment was conducted at the Cornell High Energy Synchrotron Source (CHESS), which is supported by the National Science Foundation under Award No. DMR-1332208. This work made use of the Cornell Center for Materials Research (CCMR) Shared Facilities, which are supported through the NSF MRSEC program (No. DMR-1719875). The FEI Titan Themis 300 was acquired through No. NSF-MRI-1429155, with additional support from Cornell University, the Weill Institute, and the Kavli Institute at Cornell. Substrate preparation was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the NSF (Grant No. ECCS-15420819).",
year = "2019",
month = jul,
day = "29",
doi = "10.1103/PhysRevMaterials.3.073403",
language = "English (US)",
volume = "3",
journal = "Physical Review Materials",
issn = "2475-9953",
publisher = "American Physical Society",
number = "7",
}