Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density

Z. Wang, B. H. Goodge, D. J. Baek, M. J. Zachman, X. Huang, X. Bai, C. M. Brooks, H. Paik, A. B. Mei, J. D. Brock, J. P. Maria, L. F. Kourkoutis, D. G. Schlom

Research output: Contribution to journalArticle

Abstract

The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.

Original languageEnglish (US)
Article number073403
JournalPhysical Review Materials
Volume3
Issue number7
DOIs
StatePublished - Jul 29 2019

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Defect density
Silicon
Defects
Epitaxial films
defects
silicon
Phase boundaries
curves
Full width at half maximum
Diffraction
Transmission electron microscopy
X rays
Microstructure
Scanning electron microscopy
x ray diffraction
transmission electron microscopy
microstructure
scanning electron microscopy
strontium titanium oxide

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Wang, Z., Goodge, B. H., Baek, D. J., Zachman, M. J., Huang, X., Bai, X., ... Schlom, D. G. (2019). Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. Physical Review Materials, 3(7), [073403]. https://doi.org/10.1103/PhysRevMaterials.3.073403
Wang, Z. ; Goodge, B. H. ; Baek, D. J. ; Zachman, M. J. ; Huang, X. ; Bai, X. ; Brooks, C. M. ; Paik, H. ; Mei, A. B. ; Brock, J. D. ; Maria, J. P. ; Kourkoutis, L. F. ; Schlom, D. G. / Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. In: Physical Review Materials. 2019 ; Vol. 3, No. 7.
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Wang, Z, Goodge, BH, Baek, DJ, Zachman, MJ, Huang, X, Bai, X, Brooks, CM, Paik, H, Mei, AB, Brock, JD, Maria, JP, Kourkoutis, LF & Schlom, DG 2019, 'Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density', Physical Review Materials, vol. 3, no. 7, 073403. https://doi.org/10.1103/PhysRevMaterials.3.073403

Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. / Wang, Z.; Goodge, B. H.; Baek, D. J.; Zachman, M. J.; Huang, X.; Bai, X.; Brooks, C. M.; Paik, H.; Mei, A. B.; Brock, J. D.; Maria, J. P.; Kourkoutis, L. F.; Schlom, D. G.

In: Physical Review Materials, Vol. 3, No. 7, 073403, 29.07.2019.

Research output: Contribution to journalArticle

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AU - Wang, Z.

AU - Goodge, B. H.

AU - Baek, D. J.

AU - Zachman, M. J.

AU - Huang, X.

AU - Bai, X.

AU - Brooks, C. M.

AU - Paik, H.

AU - Mei, A. B.

AU - Brock, J. D.

AU - Maria, J. P.

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AB - The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.

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