Abstract
The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.
| Original language | English (US) |
|---|---|
| Article number | 073403 |
| Journal | Physical Review Materials |
| Volume | 3 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jul 29 2019 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Physics and Astronomy (miscellaneous)
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Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. / Wang, Z.; Goodge, B. H.; Baek, D. J.; Zachman, M. J.; Huang, X.; Bai, X.; Brooks, C. M.; Paik, H.; Mei, A. B.; Brock, J. D.; Maria, J. P.; Kourkoutis, L. F.; Schlom, D. G.
In: Physical Review Materials, Vol. 3, No. 7, 073403, 29.07.2019.Research output: Contribution to journal › Article
TY - JOUR
T1 - Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density
AU - Wang, Z.
AU - Goodge, B. H.
AU - Baek, D. J.
AU - Zachman, M. J.
AU - Huang, X.
AU - Bai, X.
AU - Brooks, C. M.
AU - Paik, H.
AU - Mei, A. B.
AU - Brock, J. D.
AU - Maria, J. P.
AU - Kourkoutis, L. F.
AU - Schlom, D. G.
PY - 2019/7/29
Y1 - 2019/7/29
N2 - The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.
AB - The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.
UR - http://www.scopus.com/inward/record.url?scp=85073641329&partnerID=8YFLogxK
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U2 - 10.1103/PhysRevMaterials.3.073403
DO - 10.1103/PhysRevMaterials.3.073403
M3 - Article
AN - SCOPUS:85073641329
VL - 3
JO - Physical Review Materials
JF - Physical Review Materials
SN - 2475-9953
IS - 7
M1 - 073403
ER -