Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density

Z. Wang; B. H. Goodge; D. J. Baek; M. J. Zachman; X. Huang; X. Bai; C. M. Brooks; H. Paik; A. B. Mei; J. D. Brock; J. P. Maria; L. F. Kourkoutis; D. G. Schlom

doi:10.1103/PhysRevMaterials.3.073403

Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density

Z. Wang, B. H. Goodge, D. J. Baek, M. J. Zachman, X. Huang, X. Bai, C. M. Brooks, H. Paik, A. B. Mei, J. D. Brock, J. P. Maria, L. F. Kourkoutis, D. G. Schlom

Materials Science and Engineering

Research output: Contribution to journal › Article

Abstract

The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.

Original language	English (US)
Article number	073403
Journal	Physical Review Materials
Volume	3
Issue number	7
DOIs	https://doi.org/10.1103/PhysRevMaterials.3.073403
State	Published - Jul 29 2019

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All Science Journal Classification (ASJC) codes

Materials Science(all)
Physics and Astronomy (miscellaneous)

Cite this

Wang, Z., Goodge, B. H., Baek, D. J., Zachman, M. J., Huang, X., Bai, X., Brooks, C. M., Paik, H., Mei, A. B., Brock, J. D., Maria, J. P., Kourkoutis, L. F., & Schlom, D. G. (2019). Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. Physical Review Materials, 3(7), [073403]. https://doi.org/10.1103/PhysRevMaterials.3.073403

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title = "Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density",

abstract = "The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.",

author = "Z. Wang and Goodge, {B. H.} and Baek, {D. J.} and Zachman, {M. J.} and X. Huang and X. Bai and Brooks, {C. M.} and H. Paik and Mei, {A. B.} and Brock, {J. D.} and Maria, {J. P.} and Kourkoutis, {L. F.} and Schlom, {D. G.}",

year = "2019",

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day = "29",

doi = "10.1103/PhysRevMaterials.3.073403",

language = "English (US)",

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publisher = "American Physical Society",

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Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density. / Wang, Z.; Goodge, B. H.; Baek, D. J.; Zachman, M. J.; Huang, X.; Bai, X.; Brooks, C. M.; Paik, H.; Mei, A. B.; Brock, J. D.; Maria, J. P.; Kourkoutis, L. F.; Schlom, D. G.

In: Physical Review Materials, Vol. 3, No. 7, 073403, 29.07.2019.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Epitaxial SrTi O3 film on silicon with narrow rocking curve despite huge defect density

AU - Wang, Z.

AU - Goodge, B. H.

AU - Baek, D. J.

AU - Zachman, M. J.

AU - Huang, X.

AU - Bai, X.

AU - Brooks, C. M.

AU - Paik, H.

AU - Mei, A. B.

AU - Brock, J. D.

AU - Maria, J. P.

AU - Kourkoutis, L. F.

AU - Schlom, D. G.

PY - 2019/7/29

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AB - The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03° for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the ∼8×1011cm-2 density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.

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10.1103/PhysRevMaterials.3.073403