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Erosion and degradation of EUV lithography collector mirrors under particle bombardment
Jean Paul Allain, Ahmed Hassanein, Martin Nieto, Vladimir Titov, Perry Plotkin, Edward Hinson, Bryan J. Rice, R. Bristol, Daniel Rokusek, Wayne Lytle, Brent J. Heuser, Monica M.C. Allain, Hyunsu Ju, Christopher Chrobak
Research output: Contribution to journal › Conference article › peer-review
14
Scopus
citations