Erosion and degradation of EUV lithography collector mirrors under particle bombardment

Jean Paul Allain, Ahmed Hassanein, Martin Nieto, Vladimir Titov, Perry Plotkin, Edward Hinson, Bryan J. Rice, R. Bristol, Daniel Rokusek, Wayne Lytle, Brent J. Heuser, Monica M.C. Allain, Hyunsu Ju, Christopher Chrobak

Research output: Contribution to journalConference articlepeer-review

14 Scopus citations

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