Erratum: Confocal scanning photoluminescence for mapping electron and photon beam induced microscopic changes in SiNx during nanopore fabrication (Nanotechnology (2020) 31 (395202) DOI: 10.1088/1361-6528/ab9bd4)

Xiaodong He; Zifan Tang; Shengfa Liang; Ming Liu; Weihua Guan

doi:10.1088/1361-6528/abaf45

Erratum: Confocal scanning photoluminescence for mapping electron and photon beam induced microscopic changes in SiN_x during nanopore fabrication (Nanotechnology (2020) 31 (395202) DOI: 10.1088/1361-6528/ab9bd4)

Xiaodong He, Zifan Tang, Shengfa Liang, Ming Liu, Weihua Guan

Electrical Engineering

Research output: Contribution to journal › Comment/debate › peer-review

1 Scopus citations

Abstract

Due to an error in the production process, the wrong figure set was used to produce this article. Please find the correct figures below: (Figure Presented).

Original language	English (US)
Article number	509601
Journal	Nanotechnology
Volume	31
Issue number	50
DOIs	https://doi.org/10.1088/1361-6528/abaf45
State	Published - Dec 11 2020

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Materials Science(all)
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Erratum: Confocal scanning photoluminescence for mapping electron and photon beam induced microscopic changes in SiNx during nanopore fabrication (Nanotechnology (2020) 31 (395202) DOI: 10.1088/1361-6528/ab9bd4)",

abstract = "Due to an error in the production process, the wrong figure set was used to produce this article. Please find the correct figures below: (Figure Presented).",

author = "Xiaodong He and Zifan Tang and Shengfa Liang and Ming Liu and Weihua Guan",

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Erratum : Confocal scanning photoluminescence for mapping electron and photon beam induced microscopic changes in SiN_x during nanopore fabrication (Nanotechnology (2020) 31 (395202) DOI: 10.1088/1361-6528/ab9bd4). / He, Xiaodong; Tang, Zifan; Liang, Shengfa et al.

In: Nanotechnology, Vol. 31, No. 50, 509601, 11.12.2020.

Research output: Contribution to journal › Comment/debate › peer-review

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T2 - Confocal scanning photoluminescence for mapping electron and photon beam induced microscopic changes in SiNx during nanopore fabrication (Nanotechnology (2020) 31 (395202) DOI: 10.1088/1361-6528/ab9bd4)

AU - He, Xiaodong

AU - Tang, Zifan

AU - Liang, Shengfa

AU - Liu, Ming

AU - Guan, Weihua

PY - 2020/12/11

Y1 - 2020/12/11

N2 - Due to an error in the production process, the wrong figure set was used to produce this article. Please find the correct figures below: (Figure Presented).

AB - Due to an error in the production process, the wrong figure set was used to produce this article. Please find the correct figures below: (Figure Presented).

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DO - 10.1088/1361-6528/abaf45

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AN - SCOPUS:85096513459

VL - 31

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

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