Erratum: “Optical emission investigation of the plasma enhanced chemical vapor deposition of silicon oxide films” [J. Vac. Sci. Technol. A 10, 3395 (1992)]

A. Banerjee, Tarasankar Debroy

Research output: Contribution to journalComment/debate

Original languageEnglish (US)
Number of pages1
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number1
DOIs
StatePublished - Jan 1 1993

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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