Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging

Ajay Dangi, Sumit Agrawal, Sudhanshu Tiwari, Shubham Jadhav, Christopher Cheng, Susan Trolier-Mckinstry, Rudra Pratap, Sri Rajasekhar Kothapalli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 11m cell diameter were fabricated using 650 nm thick lead zirconate titanate (PZT) as the active piezoelectric layer. The PMUTs are designed to operate at 10 MHz resonant frequency. The PMUT elements are validated for photoacoustic imaging using an agar gel phantom with embedded pencil leads as the imaging target. Photoacoustic A-line response of the targets captured by single PMUT element shows 7 MHz center frequency with 4.8 MHz bandwidth. B-mode images reconstructed from A-lines recorded during the linear scanning of a single element clearly imaged all the targets, thus validating the potential of the fabricated PMUTs for photoacoustic imaging.

Original languageEnglish (US)
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
DOIs
StatePublished - Dec 26 2018
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: Oct 28 2018Oct 31 2018

Publication series

NameProceedings of IEEE Sensors
Volume2018-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Other

Other17th IEEE SENSORS Conference, SENSORS 2018
CountryIndia
CityNew Delhi
Period10/28/1810/31/18

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Dangi, A., Agrawal, S., Tiwari, S., Jadhav, S., Cheng, C., Trolier-Mckinstry, S., Pratap, R., & Kothapalli, S. R. (2018). Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging. In 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings [8589733] (Proceedings of IEEE Sensors; Vol. 2018-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2018.8589733