Evaluation of thin oxides grown by the atomic oxygen afterglow method

Physics & Astronomy

• oxygen afterglow 100%
• evaluation 31%
• oxides 30%
• gas discharges 22%
• breakdown 15%
• electrical properties 14%
• diluents 13%
• very large scale integration 11%
• silicon 10%
• statistics 7%
• silicon dioxide 7%
• oxidation 7%
• nitrogen 7%
• microwaves 6%
• hydrogen 6%
• oxygen 5%
• temperature 2%

Engineering & Materials Science

• Oxides 42%
• Oxygen 40%
• Electric properties 21%
• Plasmas 18%
• Silicon 15%
• Charge density 13%
• Gases 11%
• Silica 10%
• Nitrogen 9%
• Oxidation 8%
• Microwaves 8%
• Hydrogen 7%
• Statistics 7%
• Chemical analysis 6%
• Temperature 3%

Chemical Compounds

• Oxide 26%
• Dioxygen 24%
• Electrical Property 16%
• Plasma 12%
• Silicon Dioxide 12%
• Diluting Agent 10%
• Gas 10%
• Charge Density 9%
• Microwave 8%
• Nitrogen 6%
• Hydrogen 5%
• Liquid Film 4%
• Oxidation Reaction 4%
• Application 3%