We present direct evidence for the creation of deep electron traps in Separation by IMplantation of OXygen buried oxides. In addition, we present combined electrical and electron spin resonance evidence which demonstrate that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, we present evidence which strongly suggests that a substantial fraction the deep electron traps are coupled to E' centers.
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics
- Nuclear Energy and Engineering
- Electrical and Electronic Engineering