Evidence for a Deep Electron Trap and Charge Compensation in Separation by Implanted Oxygen Oxides

J. F. Conley; P. M. Lenahan; P. Roitman

doi:10.1109/23.211410

Evidence for a Deep Electron Trap and Charge Compensation in Separation by Implanted Oxygen Oxides

J. F. Conley, P. M. Lenahan, P. Roitman

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26 Scopus citations

Abstract

We present direct evidence for the creation of deep electron traps in Separation by IMplantation of OXygen buried oxides. In addition, we present combined electrical and electron spin resonance evidence which demonstrate that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, we present evidence which strongly suggests that a substantial fraction the deep electron traps are coupled to E' centers.

Original language	English (US)
Pages (from-to)	2114-2120
Number of pages	7
Journal	IEEE Transactions on Nuclear Science
Volume	39
Issue number	6
DOIs	https://doi.org/10.1109/23.211410
State	Published - Dec 1992

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Nuclear Energy and Engineering
Electrical and Electronic Engineering

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10.1109/23.211410

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title = "Evidence for a Deep Electron Trap and Charge Compensation in Separation by Implanted Oxygen Oxides",

abstract = "We present direct evidence for the creation of deep electron traps in Separation by IMplantation of OXygen buried oxides. In addition, we present combined electrical and electron spin resonance evidence which demonstrate that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, we present evidence which strongly suggests that a substantial fraction the deep electron traps are coupled to E' centers.",

author = "Conley, {J. F.} and Lenahan, {P. M.} and P. Roitman",

note = "Funding Information: Acknowledgment: This work has been supported in part by the Office of Naval Research and the Defense Nuclear Agency.",

year = "1992",

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T1 - Evidence for a Deep Electron Trap and Charge Compensation in Separation by Implanted Oxygen Oxides

AU - Conley, J. F.

AU - Lenahan, P. M.

AU - Roitman, P.

N1 - Funding Information: Acknowledgment: This work has been supported in part by the Office of Naval Research and the Defense Nuclear Agency.

PY - 1992/12

Y1 - 1992/12

N2 - We present direct evidence for the creation of deep electron traps in Separation by IMplantation of OXygen buried oxides. In addition, we present combined electrical and electron spin resonance evidence which demonstrate that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, we present evidence which strongly suggests that a substantial fraction the deep electron traps are coupled to E' centers.

AB - We present direct evidence for the creation of deep electron traps in Separation by IMplantation of OXygen buried oxides. In addition, we present combined electrical and electron spin resonance evidence which demonstrate that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, we present evidence which strongly suggests that a substantial fraction the deep electron traps are coupled to E' centers.

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DO - 10.1109/23.211410

M3 - Article

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VL - 39

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EP - 2120

JO - IEEE Transactions on Nuclear Science

JF - IEEE Transactions on Nuclear Science

IS - 6

ER -

Evidence for a Deep Electron Trap and Charge Compensation in Separation by Implanted Oxygen Oxides

Abstract

All Science Journal Classification (ASJC) codes

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