Abstract
Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.
| Original language | English (US) |
|---|---|
| Article number | 024106 |
| Journal | Journal of Applied Physics |
| Volume | 119 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jan 14 2016 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
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Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils. / Bharadwaja, S. S.N.; Rajashekhar, A.; Ko, S. W.; Qu, W.; Motyka, M.; Podraza, N.; Clark, Trevor Edward; Randall, Clive A.; Trolier-McKinstry, Susan E.
In: Journal of Applied Physics, Vol. 119, No. 2, 024106, 14.01.2016.Research output: Contribution to journal › Article
TY - JOUR
T1 - Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils
AU - Bharadwaja, S. S.N.
AU - Rajashekhar, A.
AU - Ko, S. W.
AU - Qu, W.
AU - Motyka, M.
AU - Podraza, N.
AU - Clark, Trevor Edward
AU - Randall, Clive A.
AU - Trolier-McKinstry, Susan E.
PY - 2016/1/14
Y1 - 2016/1/14
N2 - Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.
AB - Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.
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U2 - 10.1063/1.4937996
DO - 10.1063/1.4937996
M3 - Article
AN - SCOPUS:84955462487
VL - 119
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 2
M1 - 024106
ER -