Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils

S. S.N. Bharadwaja, A. Rajashekhar, S. W. Ko, W. Qu, M. Motyka, N. Podraza, Trevor Edward Clark, Clive A. Randall, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

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Abstract

Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.

Original languageEnglish (US)
Article number024106
JournalJournal of Applied Physics
Volume119
Issue number2
DOIs
StatePublished - Jan 14 2016

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metal foils
excimer lasers
oxidation
foils
thin films
single crystals
oxygen
photoexcitation
tangents
ozone
ellipsometry
lasers
partial pressure
stoichiometry
energy dissipation
electron energy
permittivity
gradients
transmission electron microscopy
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Bharadwaja, S. S. N., Rajashekhar, A., Ko, S. W., Qu, W., Motyka, M., Podraza, N., ... Trolier-McKinstry, S. E. (2016). Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils. Journal of Applied Physics, 119(2), [024106]. https://doi.org/10.1063/1.4937996
Bharadwaja, S. S.N. ; Rajashekhar, A. ; Ko, S. W. ; Qu, W. ; Motyka, M. ; Podraza, N. ; Clark, Trevor Edward ; Randall, Clive A. ; Trolier-McKinstry, Susan E. / Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils. In: Journal of Applied Physics. 2016 ; Vol. 119, No. 2.
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Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils. / Bharadwaja, S. S.N.; Rajashekhar, A.; Ko, S. W.; Qu, W.; Motyka, M.; Podraza, N.; Clark, Trevor Edward; Randall, Clive A.; Trolier-McKinstry, Susan E.

In: Journal of Applied Physics, Vol. 119, No. 2, 024106, 14.01.2016.

Research output: Contribution to journalArticle

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N2 - Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.

AB - Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.

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Bharadwaja SSN, Rajashekhar A, Ko SW, Qu W, Motyka M, Podraza N et al. Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils. Journal of Applied Physics. 2016 Jan 14;119(2). 024106. https://doi.org/10.1063/1.4937996