Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators

Abdallah Ramini, Amal Hajjaj, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

Original languageEnglish (US)
Title of host publication12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791850183
DOIs
StatePublished - 2016
EventASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 - Charlotte, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume6

Other

OtherASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016
CountryUnited States
CityCharlotte
Period8/21/168/24/16

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modeling and Simulation

Fingerprint Dive into the research topics of 'Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators'. Together they form a unique fingerprint.

Cite this