Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

Abdallah Ramini, Mohammed L.F. Bellaredj, Md Abdullah Al Hafiz, Mohammad I. Younis

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We present an experimental investigation for the nonlinear dynamic behaviors of clamped-clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.

Original languageEnglish (US)
Article number015012
JournalJournal of Micromechanics and Microengineering
Volume26
Issue number1
DOIs
StatePublished - Dec 11 2015

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Arches
MEMS
Electrostatics
Electrostatic force
Macros
Hardening
Communication
Electric potential

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "We present an experimental investigation for the nonlinear dynamic behaviors of clamped-clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.",
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Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation. / Ramini, Abdallah; Bellaredj, Mohammed L.F.; Al Hafiz, Md Abdullah; Younis, Mohammad I.

In: Journal of Micromechanics and Microengineering, Vol. 26, No. 1, 015012, 11.12.2015.

Research output: Contribution to journalArticle

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AB - We present an experimental investigation for the nonlinear dynamic behaviors of clamped-clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.

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