Fabication of GaN Islands at Specific Locations on Si Substrates using FIB Induced Ga Surface Precipitation and Plasma Nitridation

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)610-611
Number of pages2
JournalMicroscopy and Microanalysis
Volume18
Issue numberS2
DOIs
StatePublished - Jul 2012

All Science Journal Classification (ASJC) codes

  • Instrumentation

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