Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films

Daisuke Saya, Denis Dezest, Thierry Leichle, Fabrice Mathieu, Liviu Nicu, Olivier Thomas, Aaron J. Welsh, Susan Trolier-Mckinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.

Original languageEnglish (US)
Title of host publication2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages89-92
Number of pages4
ISBN (Electronic)9781509047376
DOIs
StatePublished - Aug 1 2017
EventJoint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Atlanta, United States
Duration: May 7 2017May 11 2017

Publication series

Name2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference

Other

OtherJoint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017
CountryUnited States
CityAtlanta
Period5/7/175/11/17

Fingerprint

Resonators
Fabrication
NEMS
Lithography
Deterioration
Printing
Etching
Thin films
lead titanate zirconate

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

Saya, D., Dezest, D., Leichle, T., Mathieu, F., Nicu, L., Thomas, O., ... Trolier-Mckinstry, S. (2017). Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. In 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference (pp. 89-92). [8000219] (2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISAF.2017.8000219
Saya, Daisuke ; Dezest, Denis ; Leichle, Thierry ; Mathieu, Fabrice ; Nicu, Liviu ; Thomas, Olivier ; Welsh, Aaron J. ; Trolier-Mckinstry, Susan. / Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 89-92 (2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference).
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title = "Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films",
abstract = "We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.",
author = "Daisuke Saya and Denis Dezest and Thierry Leichle and Fabrice Mathieu and Liviu Nicu and Olivier Thomas and Welsh, {Aaron J.} and Susan Trolier-Mckinstry",
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Saya, D, Dezest, D, Leichle, T, Mathieu, F, Nicu, L, Thomas, O, Welsh, AJ & Trolier-Mckinstry, S 2017, Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. in 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference., 8000219, 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference, Institute of Electrical and Electronics Engineers Inc., pp. 89-92, Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017, Atlanta, United States, 5/7/17. https://doi.org/10.1109/ISAF.2017.8000219

Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. / Saya, Daisuke; Dezest, Denis; Leichle, Thierry; Mathieu, Fabrice; Nicu, Liviu; Thomas, Olivier; Welsh, Aaron J.; Trolier-Mckinstry, Susan.

2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference. Institute of Electrical and Electronics Engineers Inc., 2017. p. 89-92 8000219 (2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films

AU - Saya, Daisuke

AU - Dezest, Denis

AU - Leichle, Thierry

AU - Mathieu, Fabrice

AU - Nicu, Liviu

AU - Thomas, Olivier

AU - Welsh, Aaron J.

AU - Trolier-Mckinstry, Susan

PY - 2017/8/1

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N2 - We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.

AB - We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.

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U2 - 10.1109/ISAF.2017.8000219

DO - 10.1109/ISAF.2017.8000219

M3 - Conference contribution

AN - SCOPUS:85028524133

T3 - 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference

SP - 89

EP - 92

BT - 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Saya D, Dezest D, Leichle T, Mathieu F, Nicu L, Thomas O et al. Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. In 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference. Institute of Electrical and Electronics Engineers Inc. 2017. p. 89-92. 8000219. (2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference). https://doi.org/10.1109/ISAF.2017.8000219