Abstract
This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]
| Original language | English (US) |
|---|---|
| Article number | 6335439 |
| Pages (from-to) | 163-169 |
| Number of pages | 7 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 22 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1 2013 |
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All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
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Fabrication and characterization of micromachined piezoelectric T-Beam actuators. / Mateti, Kiron; Zhang, Zheqian; Rahn, Christopher D.; Tadigadapa, Srinivas A.
In: Journal of Microelectromechanical Systems, Vol. 22, No. 1, 6335439, 01.01.2013, p. 163-169.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication and characterization of micromachined piezoelectric T-Beam actuators
AU - Mateti, Kiron
AU - Zhang, Zheqian
AU - Rahn, Christopher D.
AU - Tadigadapa, Srinivas A.
PY - 2013/1/1
Y1 - 2013/1/1
N2 - This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]
AB - This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]
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U2 - 10.1109/JMEMS.2012.2221682
DO - 10.1109/JMEMS.2012.2221682
M3 - Article
AN - SCOPUS:84873299050
VL - 22
SP - 163
EP - 169
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 1
M1 - 6335439
ER -