Fabrication and characterization of micromachined piezoelectric T-Beam actuators

Kiron Mateti, Zheqian Zhang, Christopher D. Rahn, Srinivas A. Tadigadapa

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]

Original languageEnglish (US)
Article number6335439
Pages (from-to)163-169
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume22
Issue number1
DOIs
StatePublished - Jan 1 2013

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Reactive ion etching
Micromachining
Cantilever beams
Flanges
Aspect ratio
Analytical models
Actuators
Fabrication
Electrodes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Mateti, Kiron ; Zhang, Zheqian ; Rahn, Christopher D. ; Tadigadapa, Srinivas A. / Fabrication and characterization of micromachined piezoelectric T-Beam actuators. In: Journal of Microelectromechanical Systems. 2013 ; Vol. 22, No. 1. pp. 163-169.
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Fabrication and characterization of micromachined piezoelectric T-Beam actuators. / Mateti, Kiron; Zhang, Zheqian; Rahn, Christopher D.; Tadigadapa, Srinivas A.

In: Journal of Microelectromechanical Systems, Vol. 22, No. 1, 6335439, 01.01.2013, p. 163-169.

Research output: Contribution to journalArticle

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AB - This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]

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