Fabrication and characterization of micromachined piezoelectric T-Beam actuators

Kiron Mateti, Zheqian Zhang, Christopher D. Rahn, Srinivas Tadigadapa

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

This paper presents a monolithically fabricated microelectromechanical piezoelectric cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane displacements and sensing. High-aspect-ratio T-beams are achieved by direct micromachining of bulk lead zirconate titanate (PZT-4) via reactive ion etching of 65-μm-deep features. Electrodes deposited on the top and bottom web and flange regions of the T-shaped structure allow in-plane and out-of-plane motion actuation and sensing. The T-beam structures were tested for in-plane and out-of-plane tip displacements, out-of-plane blocking force, and impedance response. These results are explained using analytical models that predict static deflection, blocking force, and resonance frequency. Nine prototype micromachined T-beams are fabricated that achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, and 700 μN of out-of-plane blocking force. [2012-0170]

Original languageEnglish (US)
Article number6335439
Pages (from-to)163-169
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume22
Issue number1
DOIs
StatePublished - Jan 1 2013

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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